Pulsed laser deposition Thin films Hafnium silicate Citric acid Cathodoluminescence Oxygen vacancies XRD Atom probe tomography Grazing incidence X-ray diffraction Structural properties Electron paramagnetic resonance HR STEM-HAADF Epitaxy Liposomes Laser pyrolysis Oxides ADE-FDTD Hafnium silicates Nanoparticules Optical properties Crystal structure Oxide interface CO adsorption PZT Friction Sputtering Oxide materials Copper Feature erasure Erbium Raman Nanoparticles Nanostructure Matériaux hybrides Rare-earth ions Microstructure Optical amplifiers Rare earths Luminescence CoMoS Refractive index M-lines Guide d'onde Raman scattering Silicon nanoclusters Infrared absorption Silicon photonics AFM MoS2 Reactive magnetron sputtering RF magnetron sputtering Terbium Irradiation Doping High-k dielectrics Phase transition Quantum-well Rare earth FTIR Waveguides Neodymium Si nanocluster Semiconductors IR spectroscopy Nanostructuring Microstructure physique Silicon nanocrystals Pulvérisation magnétron radiofréquence Conductivity Si-rich silicon oxide Silicon nitride Terres rares Couches minces Fluorescence Films Photoluminescence Hybrid materials Nanostructured materials Electroluminescence Photovoltaic SiC GENOMIQUE Couches minces semi-conductrices Waveguide Al2O3 Pulvérisation cathodique Silicium Silicon Energy transfer Lifetime Down-conversion Hillocks Magnetron sputtering Nanostructures Microstructure physics Radiofrequency magnetron sputtering Thin film Cerium Computational electromagnetic methods Multilayers